FORMATION OF IMMOBILIZED ENZYME MEMBRANE FOR SEMICONDUCTOR BIO SENSOR

摘要

PURPOSE:To strengthen a crosslinked membrane while preventing an enzyme from eluting into a developer, by developing a photo sensitive resin film containing an enzyme and a substance to be crosslinked with a crosslinking agent in a developer photo crosslinking to crosslink the said substance and the enzyme with a crosslinking agent. CONSTITUTION:When an immobilized enzyme membrane 15 is formed on a hydrogen on sensitive section 14 of a semiconductor chemical sensor 13, first, a membrane 10 comprising a water soluble photosensitive resin containing an enzyme 8 and a substance 9 to be chemically crosslinked with a crosslinking agent in a developer is formed on the sensitive section 14. Then, the membrane 10 is photo crosslinked using a photomask 11 and developed by the developer containing the enzyme 8 and the crosslinking agent to be crosslinked with the substance 9 to form a membrane 15 comprising an immobilized enzyme membrane 12. According to this method, the membrane 15 photo crosslinked increases the membrane strength by chemical crosslinking while the enzyme 8 is prevented from eluting into the developer by chemical crosslinking.