CHARGED PARTICLE BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a charged particle beam device in which the information based on the charged particles discharged from the bottom of a high aspect structure is made more obvious.SOLUTION: The charged particle beam device includes a first orthogonal electromagnetic field generator which deflects charged particles discharged from a sample, a second orthogonal electromagnetic field generator which further deflects the charged particles deflected by the first orthogonal electromagnetic field generator, an aperture formation member having a passage aperture of a charged particle beam, and a third orthogonal electromagnetic field generator for deflecting the charged particles passed through the aperture formation member.