| 摘要 |
PROBLEM TO BE SOLVED: To provide a single crystal pulling device, capable of further accurately measuring weight. SOLUTION: The single crystal pulling device A1 is configured to pull up a single crystal 1 in a sealed container 2 by moving a support 5 having a weight detection means 541 to move a pulling shaft 3 and a shaft support unit 4. The shaft support unit 4 includes a body portion 41 supporting the pulling shaft 3 and a supported portion 43 connected to the body portion 41. The support 5 includes a support portion 54 supporting the supported portion 43, an extension portion 53 disposed to be located above the supported portion 43 in axial direction z, a first cylinder 71 which is provided between the extension portion 53 and the supported portion 43 and is expansible and contractible in the axial direction z, a second cylinder 72 which is configured to surround the pulling shaft 3 and is expansible and contractible in the axial direction z with the upper end in the axial direction thereof being fixed to the body portion 41, and a pipe 74 connecting the first cylinder 71 to the second cylinder 72. COPYRIGHT: (C)2012,JPO&INPIT |
