| 摘要 |
PROBLEM TO BE SOLVED: To improve uniformity in film thickness.SOLUTION: A coating applicator according to an embodiment includes a nozzle and a movement mechanism. The nozzle includes: a storage chamber in which a coating liquid is stored; and a slit-like flow passage communicating with the storage chamber. The coating liquid is discharged from a discharge opening formed at the front end of the flow passage. The movement mechanism allows the nozzle and a substrate to move relatively along the surface of the substrate. In the flow passage provided in the nozzle, resistance of the flow passage is larger in a center part in the longitudinal direction than at each end part in the longitudinal direction. |
