发明名称 MICROBUBBLE TYPE PROCESSING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a microbubble type processing apparatus for raising the production volume by improving the cleaning efficiency while reducing the cost.SOLUTION: The microbubble type processing apparatus includes: a processing tank 14 which includes a housing tank 28 with open upper end in which at least one processed member 12 is immersed in a liquid 18, and overflow receiving parts 16 provided on both sides of the upper end opening of the housing tank 28 so as to face each other; two movable flow guide plates 20 provided in the housing tank 28; and an aeration element 24 provided in the housing tank 28 while being immersed in the liquid 18 and disposed under the processed member 12. The aeration element 24 generates multiple microbubbles of the same size which process the surface of the processed member by ascending through the liquid 18 linearly at the same speed. The two movable flow guide plates 20 guide the microbubbles, which have moved upward through the liquid 18 while accompanying impurities separated from the surface after processing, so that the microbubbles flow to the two overflow receiving parts 16.
申请公布号 JP2014011463(A) 申请公布日期 2014.01.20
申请号 JP20130133344 申请日期 2013.06.26
申请人 TAIWAN UYEMURA CO LTD;C UYEMURA & CO LTD 发明人 MIKI SATOSHI;WANG KAI YI;PENG CHIH CHIANG;SU SHENGI;DAI JIARONG
分类号 H01L21/304;B01F3/04;B01F5/06;B08B3/04;B08B3/10;C23G3/00 主分类号 H01L21/304
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