FABRICATION METHOD OF ABSORBER LAYERS IN THE CIS SOLAR SELL SYSTEM AND FABRICATION EQUIPMENT THEREOF

摘要

The present invention relates to a method for fabricating an absorber layer in a CIS solar sell system using an organic metal Se source. More particularly, the present invention relates to a method for fabricating an absorber layer in a CIS solar sell system including a selenization process using the vapor pressure of the organic metal Se source without using a carrier gas. The present invention is to save the cost of equipment installation by simplifying a carrier gas generation apparatus and to safely and cheaply provide a high quality CIS absorption layer including the Se content of 50% or more in an absorption thin film by easily controlling reaction. [Reference numerals] (AA) MFC or pressure control valve; (BB) Se source; (CC,DD,EE,FF) Valve; (GG) Quartz window; (HH) Cu-III group metal/Mo/glass substrate; (II) Heater; (JJ) Heating chamber; (KK) Selenization chamber; (LL) Liquid selenium source; (MM) Water with controlled temperature; (NN) Thermostat