PROCEDE ET DISPOSITIF DE MESURE DE CHAMP ELECTRIQUE, ET SON PROCEDE DE FABRICATION

摘要

The method involves positioning a microelectromechanical system (MEMS) sensor for measuring electric field, where the sensor includes a support with a base and a connecting arm (21), and an electrically charged membrane (10) movable due to an electric field with respect to the base of the support. The movement of the electrically charged membrane is determined by a measurement system associated with the sensor, and a value of the electric field is determined from the movement of the electrically charged membrane. Independent claims are also included for the following: (1) a device for measuring electric field (2) a method for manufacturing a device for measuring electric field.