| 摘要 |
PROBLEM TO BE SOLVED: To provide an air supply and exhaust fan control system capable of controlling a room air pressure in a clean room to reach to a target room air pressure, rapidly after starting an air supply and exhaust fan.SOLUTION: A controller 19 in an air supply and exhaust fan control system 10 includes supply air flow sustaining means for suspending an operation of supply air gradual increasing means to sustain a supply air flow of an air supply fan 12 at the time of the suspension of the operation of the supply air gradual increasing means if a room air pressure in clean rooms 11A and 11B, measured by a pressure sensor 18, exceeds an upper reference room air pressure, after starting air supply and exhaust fans 12 and 13, until a room air pressure in the clean rooms 11A and 11B reaches to a target room air pressure. While the supply air flow sustaining means sustaining a supply air flow of the air supply fan 12, an operation of exhaust air flow gradual increasing means continues for the exhaust fan 13. |
