APPARATUS AND METHOD FOR MANUFACTURING TI-BASED DIELECTRIC MATERIAL
摘要
Disclosed are a device and a method for manufacturing a Ti-based dielectric material. The device for manufacturing a Ti-based dielectric material includes a reactor with a main body unit, a cover unit, and a heating unit surrounding at least some parts of the main body unit, wherein one of the main body unit and the cover unit contains Ti metal.
申请公布号
KR20140006296(A)
申请公布日期
2014.01.16
申请号
KR20120071972
申请日期
2012.07.02
申请人
SAMSUNG FINE CHEMICALS CO., LTD.
发明人
CHOI, YOUN KYU;CHA, KYOUNG JIN;JEONG, WON SIK;KIM, HYUN;PARK, JI HO