| 摘要 |
PROBLEM TO BE SOLVED: To meet requirements for a smaller size.SOLUTION: In a stage mechanism comprising a stage L enabled to shift within a face, position attitude setting support means 11, 12 and 13 that set positions and attitudes of the stage support the stage, and the position attitude setting support means has a rotational drive source m having a drive shaft m1 orthogonal to the stage face, a rotational link part rm1 that is fixed to the drive shaft and rotates, and a connecting part r1 connecting the rotational link part to the stage. The position and attitude of the stage are set by adjusting an angle of the rotational link part. |
