| 摘要 |
PURPOSE: A molybdenum-titanium alloy layer etchant composition and a manufacturing method of a TFT array substrate for liquid crystal display are provided to effectively etch molybdenum-titanium alloy layers and indium oxide film, to maximize efficiency of etching process and to minimize attacking down metal (copper). CONSTITUTION: A molybdenum-titanium alloy layer etchant composition comprises 10-25 wt% H2O2, 0.1-2 wt% of perfluorinated compound, 0.1-5 wt% of heterocyclic amine compound and 68-90 wt% of water. The perfluorinated compound is one or more selected from HF, NaF, NH4F, NH4BF4, NH4FHF, KF, KHF2, AlF3 and HBF4. A manufacturing method of the TFT array substrate comprises a process of etching the molybdenum-titanium alloy layer by using the molybdenum-titanium alloy layer etchant composition. [Reference numerals] (AA) No residue |
