| 摘要 |
<p>The present invention relates to a polishing device for plate-like body, provided with: a suction sheet for retaining a plate-like body through suction; a film to which the suction sheet is attached; a carrier to which the film is attached; and a polishing pad, wherein a pressurized fluid is supplied between the film and the carrier, and the plate-like body retained on the suction sheet through suction is pressed against the polishing pad during polishing, due to the pressure of the pressurized fluid. In this polishing device for plate-like body, an intermediate sheet having rigidity in the tensioning direction that is higher than the rigidity of the suction sheet in the tensioning direction is interposed between the film and the suction sheet, the suction sheet is bonded to one surface of the intermediate sheet, and the other surface of the intermediate sheet is detachably attached to the film by a planar fastener.</p> |
