| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate holding device which can arrange two substrates on the same reference position at different times and orient the substrates in the same reference direction.SOLUTION: A substrate holding device comprises: first and second hand moving units 17a, 17b for moving first and second hands 18a, 18b vertically, rotationally in a horizontal plane and linearly in the horizontal plane; first and second orientation change units 14a, 14b for changing orientations of the first and second hands 18a, 18b; and a control unit for controlling the first and second hand moving units 17a, 17b to move the first and second hands 18a, 18b, and controlling the first and second orientation change units 14a, 14b to change the orientations of the first and second hands 18a, 18b. In the control unit, a reference position and a reference direction are set, and first and second substrates 28a, 28b are positioned on the same reference position at different times in such a way as to be oriented in the same reference direction. |
