| 摘要 |
The present invention addresses the problem of providing an apparatus for inspecting airtightness of a subject to be inspected, said apparatus being capable of performing airtightness inspection in a short time. This airtightness inspection apparatus is characterized in being provided with a storing container (2) for storing a subject to be inspected (X), a suction means (3) that sucks a gas inside of the storing container (2), and a gas detection means (4) that is capable of detecting a gaseous subject to be detected, said subject having leaked from the subject to be inspected (X). The airtightness inspection apparatus is also characterized in that the suction means (3) performs suction through a suction port (22c), which is capable of guiding the gas at the periphery of the subject to be inspected (X) to the gas detection means (4) that is disposed in the storing container (2), and which is provided at a position inside of the storing container (2). |
