SUSCEPTOR AND VAPOR-PHASE GROWTH APPARATUS

摘要

The present invention provides a susceptor which is arranged inside a chamber to be rotated and which has a plurality of substrate mounting parts to be rotated. A substrate on which a thin film is deposited is mounted on a substrate mounting part. The susceptor has a donut shape wherein there is an opening at an inner periphery of the susceptor, into which a rotating shaft to rotate the susceptor is inserted, and the susceptor has a plurality of notches extending in a radial direction at an outer periphery and/or a periphery of the opening.