发明名称 |
Titania and sulfur co-doped quartz glass member and making method |
摘要 |
A titania and sulfur co-doped quartz glass member is provided. Due to co-doping of titania and sulfur, the quartz glass member undergoes zero expansion at a certain temperature and low thermal expansion over a wide temperature range, and is thus suited for use in a commercial EUV lithography tool. A manufacturing method and an optical member for EUV lithography are also provided. |
申请公布号 |
US8629071(B2) |
申请公布日期 |
2014.01.14 |
申请号 |
US201313761881 |
申请日期 |
2013.02.07 |
申请人 |
SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
MAIDA SHIGERU;OTSUKA HISATOSHI |
分类号 |
C03C3/06;C03B20/00;C03C3/04;G02B1/00;G03F1/22;G03F1/24;G03F1/60;H01L21/027 |
主分类号 |
C03C3/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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