FILM FORMING APPARATUS, FILM FORMING METHOD, METHOD FOR MANUFACTURING ORGANIC LIGHT EMITTING ELEMENT, AND ORGANIC LIGHT EMITTING ELEMENT

摘要

Provided are a film forming apparatus and a film forming method that can carry out intended co-deposition, a method for manufacturing an organic light emitting element, and an organic light emitting element. The film forming head of the film forming apparatus is provided with an organic film forming material supply part (4) that sprays vapor of the organic film forming material toward a substrate (G) being processed and an inorganic film forming material supply part (5) that sprays vapor of an inorganic film forming material toward the substrate (G) being processed. The organic film forming material supply part (4) and the inorganic film forming material supply part (5) are constituted so as to be movable in the horizontal direction and the vertical direction, and the arrangement thereof is controlled to form a film in which the mixing proportion of the organic material and inorganic material sprayed by spray nozzles (41a, 51a) is different in the direction of thickness.