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发明名称
用于半导体沉积设备之电浆功率转接杆
摘要
【物品用途】;本创作系关于一种用于半导体沉积设备之电浆功率转接杆。;【创作特点】;此杆系由金属材料制成。此杆系置于一腔室之一反应空间与半导体制造设备中之一电浆功率产生器之间。此杆系用于转接由电浆功率产生器所产生出之电浆功率至该腔室。此杆具用于引入该腔室之一端部,且在该杆之具一延伸部以增进转接电浆功率之效率。
申请公布号
TWD158417
申请公布日期
2014.01.11
申请号
TW101303544
申请日期
2012.06.19
申请人
ASM智慧财产控股公司 荷兰
发明人
李政镐;金友赞;郑相振;张显秀
分类号
13-99
主分类号
13-99
代理机构
代理人
阎启泰 台北市中山区长安东路2段112号9楼;林景郁 台北市中山区长安东路2段112号9楼
主权项
地址
荷兰
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