| 摘要 |
A vacuum drying device is disclosed. An inner boundary surface of a housing in which temperature is low is heated by a first heater and a second heater in a drying process of a substrate. The first heater is installed on an inner upper surface and an inner lower surface of the housing. The second heater is installed on the inner boundary surface of the housing. A solvent containing a spreading solution, which is spread on the substrate, is provided not to be condensed on the inner boundary surface of the housing, and is evaporated/discharged, thereby preventing damage to the substrate by the solvent. Therefore, the quality of the substrate is improved and the cycle of the vacuum drying device is extended. |
