CORE PART OF QUARTZ OPTICAL WAVEGUIDE AND ITS FORMATION

摘要

PURPOSE: To provide a core part of quartz optical waveguide having a good rectangular shape be cause of that the decrease in line width is extremely little and the perpendicularity of the side wall of the core part is excellent. CONSTITUTION: The core part 7 of quartz optical waveguide is obtained by forming a core layer 2 on a quartz glass substrate 1 and forming a mask layer 3 for forming the core part thereon. A photoresist layer 5 is formed thereon and the unnecessary mask part of the mask layer 3 for forming the core part is removed by reactive ion etching using chlorine or chlorine compd. to form masks 6, 8 for forming the core part. The unnecessary part of the core layer 2 is then removed by reactive ion etching using fluorine or fluorine compd.