发明名称 METHOD FOR PRODUCING SEMICONDUCTOR DEVICE AND SEMICONDURCTOR DEVICE
摘要 A production method for a semiconductor device having: a step in which a conductor layer (7) and a first semiconductor layer (5a) including donor impurities or acceptor impurities are formed upon a first semiconductor substrate; a step in which a second insulating layer (8) is formed so as to cover the first semiconductor layer (5a); a step in which the thickness of the first semiconductor substrate (9) is reduced to a prescribed thickness; a step in which a columnar semiconductor (1a) having a columnar structure is formed from the first semiconductor substrate upon the first semiconductor layer (5a); a step in which a first semiconductor area (6a) is formed on the columnar semiconductor (1a) by scattering impurities from the first semiconductor layer (5a); and a step in which pixels for a solid-state imaging device are formed using the columnar semiconductor (1a) after the impurities have been scattered.
申请公布号 KR101350577(B1) 申请公布日期 2014.01.10
申请号 KR20127015784 申请日期 2012.02.07
申请人 发明人
分类号 H01L21/336;H01L29/78 主分类号 H01L21/336
代理机构 代理人
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