BUFFER CHAMBER AND IN-LINE CHAMBER SYSTEM COMPRISING THE SAME

摘要

The present invention relates to a buffer chamber which maximizes the efficiency of the manufacturing process and reduces the manufacturing costs, and an in-line chamber system including the same. The buffer chamber comprises a chamber body where an inlet is formed at one side thereof and an outlet is formed at the other side thereof; a first transfer unit which transfers a moving body inputted through the inlet toward the outlet; an idle transfer unit which is placed between the first transfer unit and the outlet in order to allow the moving body to pass; an information receiving unit which receives distance information on the distance between a preceding moving body and the moving body, wherein the distance information is detected by a distance sensor of the moving body and transmitted by an information transmitting unit of the moving body; and a transfer speed determining unit which determines the transfer speed of the moving body in the first transfer unit according to the distance information received by the information receiving unit. [Reference numerals] (DR) Driving unit; (IR) Information receiving unit; (VD) Transfer speed determining unit