发明名称 COATING LIQUID FOR DOPANT DIFFUSION, METHOD FOR APPLYING SAME, METHOD FOR PRODUCING SEMICONDUCTOR USING SAME, AND SEMICONDUCTOR
摘要 <p>This coating liquid for dopant diffusion contains, as a dopant source, an acid that is selected from among phosphoric acids and boric acids and an organic amine salt of an organic amine compound (alpha) having 1-4 nitrogen atoms. Consequently, there can be provided: a coating liquid for dopant diffusion, which is capable of providing a semiconductor having a high surface resistivity; a method for applying the coating liquid for dopant diffusion; a method for producing a semiconductor using the coating liquid for dopant diffusion; and a semiconductor.</p>
申请公布号 WO2014007263(A1) 申请公布日期 2014.01.09
申请号 WO2013JP68178 申请日期 2013.07.02
申请人 THE NIPPON SYNTHETIC CHEMICAL INDUSTRY CO., LTD. 发明人 KATSUMA KATSUHIKO;AOKI YASUHIRO
分类号 H01L21/225;H01L21/228;H01L31/04 主分类号 H01L21/225
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