SUBSTRATE INVERSION DEVICE AND SUBSTRATE PROCESSING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a technology capable of properly inverting multiple substrates at one time.SOLUTION: A substrate inversion device 100 includes: a support mechanism 70 which supports multiple substrates W in a state where the multiple substrate W are laminated in a horizontal posture so as to be spaced away in a vertical direction; and a holding inversion mechanism 80 which holds the multiple substrates W supported by the support mechanism 70 and inverts the substrates W at one time. Each support member 74 supporting the substrate W in the support mechanism 70 is moved downward away from the center of each substrate W when viewed in the vertical direction to be moved from a support position to a standby position. On the other hand, each holding member 83 holding the substrate W in the holding inversion mechanism 80 is moved from a separation position to an approach position by a holding member driving part and is elastically biased toward a side surface of the substrate by an elastic member in the approach position.