| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical module capable of positioning an optical fiber and an optical element with high accuracy by using a sub-substrate on which the optical fiber is fixed, and a manufacturing method of the optical module.SOLUTION: An optical module (1) comprises: a sub-substrate (30) including a support layer (31), an active layer (33), a BOX layer (32) disposed between the support layer and the active layer, and a height adjustment layer (34); an optical fiber (20); and an optical element (40) fixed on a silicon substrate (10). The sub-substrate has a fixing groove (36) formed by the active layer and the BOX layer, and the optical fiber is fixed in the fixing groove. The optical fiber and the optical element are optically coupled to each other such that the sub-substrate is positioned through the height adjustment layer relative to the silicon substrate. Also, there is provided a manufacturing method thereof. |
