| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate inspection pin which has a shape applicable to the width of a miniaturized pad and can increase an allowable tolerance for alignment errors relative to the center of the pad.SOLUTION: A substrate inspection pin 100 comprises a trunk portion 110, and a contact portion 120, which is formed at one end of the trunk portion 110 and has a flat shape. The diameter F of the contact portion 120 is smaller than the diameter 2R of the trunk portion 110. |
