发明名称 RADIATION SENSITIVE COMPOSITION
摘要 PROBLEM TO BE SOLVED: To provide a novel positive type highly active composition particularly for manufacturing a relief structure by containing a mixture of a plurality of phenol resins in which phenolic hydroxyl group is partially substituted by specified acetal and/or ketal side groups in a specified ratio as resin component. SOLUTION: This composite contains 9.9-95wt.% of a phenol resin in which phenolic hydroxyl group is substituted by a protecting group of the formula I up to 10-90%, 4.9-90wt.% of a phenol resin in which phenolic hydroxyl group is substituted by protecting group of the formula II up to 10-90%, and 0.1-20.0wt.% of a material forming an acid under the influence of chemical acting radiation. In the formulae, R1 , R2 each independently represent C1-C6 alkyl, or C3-C6 cycloalkyl non-substituted or substituted by C1-C4 alkyl, and R3 represents C1-C6 alkyl. X represents C1-C4 alkoxy non-substituted or substituted by C1-C4 alkyl.
申请公布号 JPH1090902(A) 申请公布日期 1998.04.10
申请号 JP19970192546 申请日期 1997.07.17
申请人 OLIN MICROELECTRON CHEM INC 发明人 MERTESDORF CARL-LORENZ;FALCIGNO PASQUALE ALFRED
分类号 C08L25/18;C09D125/18;G03F7/004;G03F7/039;H01L21/027;(IPC1-7):G03F7/039 主分类号 C08L25/18
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