发明名称 |
METHOD FOR STORING METALLIC LANTHANUM TARGET, VACUUM-SEALED METALLIC LANTHANUM TARGET, AND THIN FILM FORMED BY SPUTTERING USING METALLIC LANTHANUM TARGET |
摘要 |
A method of storing a metal lanthanum sputtering target, wherein a surface of a metal lanthanum target to be stored is processed so as to achieve a roughness Ra of 1 µm or less, a lanthanum fluoride coating is formed on the surface thereof, the metal lanthanum target to which the lanthanum fluoride coating was formed is subsequently charged in a vacuum pack with an oxygen transmission rate of 0.1 cm 3 /m 2 per 24 h at 1 atm or less and a moisture vapor transmission rate of 0.1 g/m 2 per 24 h or less, and the vacuum pack is thereafter subject to vacuum suction and sealing for storage. This invention aims to provide technology for enabling the long-term storage of a sputtering target in a usable state by devising the method of storing a metal lanthanum target as a rare earth metal, and thereby inhibiting the degradation phenomenon caused by the oxidation of the target due to residual air or the inclusion of air. |
申请公布号 |
EP2682497(A1) |
申请公布日期 |
2014.01.08 |
申请号 |
EP20120751723 |
申请日期 |
2012.02.13 |
申请人 |
JX NIPPON MINING & METALS CORPORATION |
发明人 |
NARITA SATOYASU;SATOH KAZUYUKI;KOIDO YOSHIMASA |
分类号 |
C23C14/34;B65B5/00;H01L21/316 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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