| 摘要 |
PROBLEM TO BE SOLVED: To provide a metal vapor laser which is capable of generating laser rays of high power stably and efficiently, and restraining laser rays from varying in output power, as an inner temperature inside a discharge tube gets out of a required range of temperature due to the effect that the discharge tube is varied in heat insulation properties, with an elapse of a time when the metal vapor laser oscillates laser rays or an effect of impurity gas. SOLUTION: A metal bump 9 located inside a discharge tube 6 which is coaxially arranged in a vacuum vessel 3 is turned into vapor by a discharge which occurs between a cathode 7 and an anode 8 that are each provided to cover openings of the discharge tube 6, and laser rays are oscillated to be projected outside of the vacuum chamber 3 through a mirror 18b. A gas feed device 15 which feeds buffer gas, and an gas exhaust device 16 which exhausts buffer gas, are provided to the vacuum chamber 3. Projected laser rays are detected and the output power of the laser lays is measured, and a gas pressure regulator 25 which regulates buffer gas in pressure based on a measurement result is provided. The metl vapor laser is structured ads mentioned above, wherein gas pressure inside the vacuum chamber 3 is regulated by the gas pressure regulator 25 based on a measurement result, and the discharge tube 6 is kept at a required inner temperature and capable of generating laser rays stably. |
