发明名称 Process and chip for calibrating a wire bonder
摘要 The calibration method has a test chip (2) mounted on a substrate (1) supplied to the bonding position, with detection of the signal characteristic provided by sensors (5,6), such as resistance elements, mounted on the test chip, during bonding to a bond pad (4). The signal characteristic is evaluated for calibration of at least one parameter of the wire bonder.
申请公布号 EP0953398(A1) 申请公布日期 1999.11.03
申请号 EP19980810104 申请日期 1998.02.06
申请人 ESEC SA 发明人 BOLLIGER, DANIEL;MAYER, MICHAEL;PAUL, OLIVER;STOESSEL, ZENO 43
分类号 H01L21/60;B23K20/00 主分类号 H01L21/60
代理机构 代理人
主权项
地址