| 摘要 |
The present invention relates to an apparatus and method for feeding organic matter, which is capable of feeding a required large amount of organic matter to a crucible without releasing a vacuum state during an organic light emitting diode (OLED) film deposition process. The apparatus of the present invention comprises: a repository for storing organic matter; a stirrer vertically provided in the repository to stir the organic matter stored in the repository while being rotated by a separate drive means such that the organic matter cannot agglomerate; a connecting pipe provided to be connected to the lower end of the repository; a first door provided on the lower end of the repository to open and close the space between the repository and the connecting pipe; a crucible for heating the organic matter; a second door provided on one side of the connecting pipe to open and close the space between the connecting pipe and the crucible; an auger horizontally provided inside the connecting pipe to be rotated by a separate drive means and moving organic matter in the connecting pipe to feed the organic matter to the crucible; and a linear evaporation source for evaporating the organic matter heated in the crucible. According to the present invention, the vacuum state of a vacuum chamber cannot be released during the OLED film deposition process and organic matter can be fed to the crucible for a long time without replacing the crucible, thereby significantly reducing time and costs required to feed organic matter to the crucible. |
