发明名称 |
POSITIVE-TYPE PHOTORESIST COMPOSITION FOR THICK FILM, METHOD FOR PRODUCING THICK FILM RESIST PATTERN, AND METHOD FOR PRODUCING CONNECTION TERMINAL |
摘要 |
<p>Provided are a positive-type photoresist composition for a thick film, a method for producing a thick film resist pattern using the same, and a method for producing a connection terminal. The positive-type photoresist composition used for forming the thick film resist pattern on a supporter includes a resin component (A) in which the solubility for a developer is changed by actions of the acid; and an acid generator component (B) which generates acid by light exposure. The acid generator component (B) includes an acid generator (B1) which includes a compound represented by general formula (b1-1). [In the formula, Y^1 is a bivalent coupler; W is S, Se or I; R1 is a hydrocarbon having a substituent; R2 is an alkyl group with 1-5 hydrocarbons or alkoxy groups; if W=I, m+n=2; if W=S or Se, m+n=3, and m>=1, n>=0; p is 0-5; and X^- is double anion].</p> |
申请公布号 |
KR20140001795(A) |
申请公布日期 |
2014.01.07 |
申请号 |
KR20130075459 |
申请日期 |
2013.06.28 |
申请人 |
TOKYO OHKA KOGYO CO., LTD. |
发明人 |
SHIMIZU TAKAHIRO;UTSUMI YOSHIYUKI |
分类号 |
G03F7/039;G03F7/26;H01L21/027 |
主分类号 |
G03F7/039 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|