发明名称 Continuous vacuum deposition method
摘要 A continuous vacuum sputtering method includes the steps of providing a substrate; providing a continuous vacuum sputtering machine comprising a depositing chamber. The depositing chamber comprising at least one vacuum chamber, each vacuum chamber having a cathodic arc emitting source located therein; the substrate being loaded in the continuous vacuum sputtering machine; depositing a coating on the substrate by cathodic arc deposition using the cathodic arc emitting source.
申请公布号 US8623182(B2) 申请公布日期 2014.01.07
申请号 US201113097207 申请日期 2011.04.29
申请人 CHANG HSIN-PEI;CHEN WEN-RONG;CHIANG HUANN-WU;TAI LONE-WEN;CHEN CHENG-SHI;HON HAI PRECISION INDUSTRY CO., LTD. 发明人 CHANG HSIN-PEI;CHEN WEN-RONG;CHIANG HUANN-WU;TAI LONE-WEN;CHEN CHENG-SHI
分类号 C23C14/34 主分类号 C23C14/34
代理机构 代理人
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