发明名称 |
METHOD OF MANUFACTURING SURFACE EMITTING LASER, AND SURFACE EMITTING LASER, SURFACE EMITTING LASER ARRAY, OPTICAL SCANNING DEVICE, AND IMAGE FORMING APPARATUS |
摘要 |
A disclosed method of manufacturing a surface emitting laser includes laminating a transparent dielectric layer on an upper surface of a laminated body; forming a first resist pattern on an upper surface of the dielectric layer, the first resist pattern including a pattern defining an outer perimeter of a mesa structure and a pattern protecting a region corresponding to one of the relatively high reflection rate part and the relatively low reflection rate part included in an emitting region; etching the dielectric layer by using the first resist pattern as an etching mask; and forming a second resist pattern protecting a region corresponding to an entire emitting region. These steps are performed before the mesa structure is formed. |
申请公布号 |
KR101347963(B1) |
申请公布日期 |
2014.01.07 |
申请号 |
KR20117025846 |
申请日期 |
2010.03.15 |
申请人 |
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发明人 |
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分类号 |
G03G15/00;H01S5/183;H04N1/04 |
主分类号 |
G03G15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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