发明名称 |
POSITIVE-TONE, CHEMICALLY AMPLIFIED, AQUEOUS-DEVELOPABLE, PERMANENT DIELECTRIC |
摘要 |
In microelectronic applications, it is often desired to deposit and pattern a permanent dielectric film in order to electrically and mechanically isolate components. Photo-patternable dielectrics are attractive for these uses because of their reduced time and cost requirements. These permanent dielectrics should be high-speed, positive-tone, and aqueous-developable. This type of patternability may be achieved by using a chemically amplified deprotection reaction of tert-butoxycarbonate or tert-butyl acrylate catalyzed by a photo-inducible acid. Provided herein are: a composition for preparing a dielectric film comprising a polymer mixture, wherein the polymer mixture comprises a base polymer comprising a pendent protected organic functionality, a photocatalyst for deprotecting the protected organic functionality and a chemical cross-linker for cross-linking the dielectric film after a photo-patterning has taken place in an aqueous solution; a dielectric film prepared from said composition; and method of preparing a dielectric film. |
申请公布号 |
WO2014005011(A2) |
申请公布日期 |
2014.01.03 |
申请号 |
WO2013US48553 |
申请日期 |
2013.06.28 |
申请人 |
GEORGIA TECH RESEARCH CORPORATION |
发明人 |
MUELLER, BRENNEN, KARL;KOHL, PAUL, A. |
分类号 |
C08K5/55 |
主分类号 |
C08K5/55 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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