SUBSTRATE TRANSIT DEVICE AND SUBSTRATE HANDLING SYSTEM

摘要

A substrate transit device (1) and a substrate handling system comprising the substrate transit device (1). The substrate transit device (1) comprises a docking mechanism (11) and a delivery platform (12). The docking mechanism (11) is used to transport the delivery platform (12), so that the delivery platform (12) is docked to a substrate output device (2) and a substrate input device (3). The delivery platform (12) is used to receive a substrate (4) output by the substrate output device (2) when docked with the substrate output device (2), and transport the substrate (4) horizontally, so as to input the substrate (4) into the substrate input device (3) when docked with the substrate input device (3). The substrate handling system comprises the substrate output device (2), the substrate input device (3), and the substrate transit device (1) disposed between the substrate output device (2) and the substrate input device (3). The substrate handling system is provided with the delivery platform (12), and the delivery platform receives, delivers, and outputs the substrate (4), so that the substrate output device (2) does not need to be provided with a substrate collection area, thereby effectively reducing the area occupied by a workshop.