METHOD OF LASER ILLUMINATION WITH REDUCED SPECKLING

摘要

Proposed is a method of laser illumination with reduced speckling for in optical microscopy, machine vision systems with laser illumination, fine optical metrology, etc. The method comprises forming a net of planar ridge waveguides into an arbitrary configuration and providing them with a plurality of holograms having holographic elements formed into a predetermined organization defined by the shape of a given light spot or light field which is to be formed by light beams emitted from the holograms on the surface of the object or in a space at a distance from the planar ridge waveguide. Speckling is reduced by locating at least a part or all of the holograms at distances from each other that are equal to or greater than the coherence length. The geometry and organization of the holographic elements allows controlling position, focusing and defocusing of the beam.