发明名称 |
Sinker with a Reduced Width |
摘要 |
The width of a heavily-doped sinker is substantially reduced by forming the heavily-doped sinker to lie in between a number of closely-spaced trench isolation structures, which have been formed in a semiconductor material. During drive-in, the closely-spaced trench isolation structures significantly limit the lateral diffusion. |
申请公布号 |
US2014001596(A1) |
申请公布日期 |
2014.01.02 |
申请号 |
US201213540542 |
申请日期 |
2012.07.02 |
申请人 |
HU BINGHUA;PENDHARKAR SAMEER;MATHUR GURU;TAKEHITO TAMURA |
发明人 |
HU BINGHUA;PENDHARKAR SAMEER;MATHUR GURU;TAKEHITO TAMURA |
分类号 |
H01L29/06;H01L21/762 |
主分类号 |
H01L29/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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