LASER SYSTEM, EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM, AND METHOD OF CONTROLLING LASER APPARATUS

摘要

A laser system capable of appropriately controlling the energy of a laser beam pulse is provided. An exemplary laser system of the present disclosure may control an optical isolator to switch from a closed state to an open state and then to return to the closed state for each of the laser beam pulses repeatedly outputted from a master oscillator. The laser system may control the optical attenuator to set an optical transmittance of the optical attenuator for each of the laser beam pulses repeatedly outputted from the master oscillator.

主权项

1. A laser system comprising:
a master oscillator configured to output laser beam pulses; multiple stages of optical amplifiers disposed on an optical path of the laser beam pulses outputted from the master oscillator and configured to sequentially amplify the laser beam pulses; an optical isolator disposed on the optical path and capable of switching between an open state and a closed state; an optical attenuator disposed on the optical path and capable of setting an optical transmittance; and a controller configured to control the optical isolator and the optical attenuator, wherein the controller controls the optical isolator to switch from the closed state to the open state and then to return to the closed state for each of the laser beam pulses repeatedly outputted from the master oscillator, and the controller controls the optical attenuator to set an optical transmittance of the optical attenuator for each of the laser beam pulses repeatedly outputted from the master oscillator.