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发明名称
METHOD OF PHOTOETCHING
摘要
申请公布号
JPS5230170(A)
申请公布日期
1977.03.07
申请号
JP19750105904
申请日期
1975.09.03
申请人
HITACHI LTD
发明人
TAKEDA YUTAKA;ONOZATO YOUSEI;SASAKI YOSHIMITSU;KURATA KAZUHIRO;SATOU HITOSHI
分类号
H01L21/306;H01L21/302
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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