定位装置及微影装置,申请号TW099107381-传众专利搜索

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发明名称	定位装置及微影装置
摘要
申请公布号	TWI421651	申请公布日期	2014.01.01
申请号	TW099107381	申请日期	2010.03.12
申请人	ＡＳＭＬ荷兰公司荷兰	发明人	凡　因培　贾克　尔德理安　鲁道夫;胡克斯　玛汀;詹森　诺贝特　尔维　瑟伦索
分类号	G03F9/00	主分类号	G03F9/00
代理机构		代理人	陈长文台北市松山区敦化北路201号7楼
主权项
地址	荷兰

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