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发明名称
基板对位装置及基板收容单元
摘要
申请公布号
TWI421969
申请公布日期
2014.01.01
申请号
TW095132616
申请日期
2006.09.04
申请人
东京威力科创股份有限公司 日本
发明人
羽立良幸
分类号
H01L21/68
主分类号
H01L21/68
代理机构
代理人
林志刚 台北市中山区南京东路2段125号7楼
主权项
地址
日本
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