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发明名称
WAFER BATCH PROCESSING SYSTEM AND METHOD
摘要
申请公布号
KR100686411(B1)
申请公布日期
2007.02.26
申请号
KR20057001870
申请日期
2005.02.01
申请人
发明人
分类号
H01L21/205;H01L21/324;C23C16/46;H01L21/00;H01L21/26
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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