| 摘要 |
Failures can be detected with high accuracy even the ambient temperature changes or background vibration is applied. An angular velocity sensor is composed of a vibrator which is elastically and displaceably supported on a substrate; a driving means which vibrates the vibrator in the drive axis direction horizontal to the substrate surface; a displacement detecting means in the detection axis direction, which detects a displacement of the vibrator in the detection axis direction horizontal to the substrate surface and perpendicular to the drive axis direction; an angular velocity detecting means which detects an angular velocity based on the displacement of the vibrator in the detection axis direction; a self-vibration detecting means that detects self-vibration of the vibrator, which is generated due to leakage in the detection axis direction of the vibration of the vibrator in the drive axis direction; a self-vibration feedback circuit which completely cancels the self-vibration of the vibrator; and an abnormality determining means which determines abnormality using an output from the self-vibration detecting means. |
