| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing an ultrasonic sensor for easily preventing the polarization degradation of a piezoelectric element. <P>SOLUTION: The method of manufacturing the ultrasonic sensor (300) includes a first process of forming first and second conductive members (113a and 113b), a second process of connecting the first and second conductive members (113a and 113b) to a pair of electrodes of the piezoelectric element (112) disposed on the bottom surface of a case (111), and a third process of filling a filling material (119) into the case (111). A joining part (113c) for joining the first and second conductive members (113a and 113b) is formed in the first process, the filling material (119) is filled so that the joining part (113c) is positioned outside the filling material (119) in the third process, and a fourth process of removing the joining part (113c) is executed after the third process is ended. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
