发明名称 organic matter evaporation system
摘要 The invention relates to an organic material deposition system, particular to an organic material deposition system which is used for conveying base materials to a processing chamber by driving a mechanical arm in a conveying chamber and which is simplified in structure and thereby being shortest in reversing time for an organic material deposition process for the base materials when the organic material deposition process is performed on the two base materials in the processing chamber.
申请公布号 KR101346071(B1) 申请公布日期 2013.12.31
申请号 KR20120031234 申请日期 2012.03.27
申请人 发明人
分类号 H01L51/56 主分类号 H01L51/56
代理机构 代理人
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