发明名称 METHOD FOR ELIMINATING DEFECTS FROM SEMICONDUCTOR MATERIALS
摘要 USING A HELIUM CRYOSTAT, THE TEMPERATURE FOR A SUBSTRATE WAFER(S) IS REDUCED TO - 270.95 �C (2.2 KELVIN) FOR TWENTY-FOUR HOURS. A SOAK SEGMENT WILL HOLD THE TEMPERATURE OF THE SUBSTRATE WAFER AT -270.95 �C (2.2 KELVIN) FOR NINETY-SIX HOURS. AT SUCH TEMPERATURES, ALLOYS SUCH AS GaAS, InP, AND GaP WILL FORM DIPOLE MOLECULAR MOMENTS, WHICH WILL RE-ALIGN ALONG LINES OF INTERNAL MAGNETIC FORCE AS MOLECULAR BONDS CONDENSE. THE SUBSTRATE WAFER?S TEMPERATURE IS RAMPED UP TO ROOM TEMPERATURE OVER TWENTY-FOUR HOURS. THE TEMPERATURE OF THE SUBSTRATE WAFER IS RAMPED UP TO ASSURE THAT THE TEMPERATURE GRADIENTS MADE TO OCCUR WITHIN THE WAFER ARE KEPT LOW. TYPICALLY, A TEMPER RAMP UP TEMPERATURE WILL RANGE BETWEEN 148.89 �C TO 593.33 �C (300 OF TO 1100�F) AND DEPENDS UPON THE SINGLE CRYSTAL MATERIAL USED TO CONSTRUCT THE SUBSTRATE WAFER. THE SUBSTRATE WAFER UNDERGOES A TEMPER HOLD SEGMENT, WHICH ASSURES THAT THE ENTIRE SUBSTRATE WAFER HAS HAD THE BENEFIT OF THE TEMPERING TEMPERATURE.
申请公布号 MY150233(A) 申请公布日期 2013.12.31
申请号 MY2009PI04955 申请日期 2008.06.02
申请人 OPC LASER SYSTEMS LLC 发明人 HENRICHS, JOSEPH REID
分类号 C23C14/34 主分类号 C23C14/34
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