| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow setting method and a coater which facilitate management of the flow of coatings discharged from individual nozzles. SOLUTION: A coating supplied from a single supply source through a main tube is separated into two or more branch tubes, and the flow of a coating flowing through each branch tube is regulated to a prescribed flow with a branch-tube flow regulating mechanism arranged in each branch pipe so as to discharge the coating from nozzle connected with each branch tube. When the coating supplied to the main tube from the supply source is supplied to a branch tube selected from among the branch tubes with a supply of the coating to other branch tubes stopped, the flow of the coating flowing through the main tube is measured, and a target flow serving as a regulation target corresponding to a prescribed flow for the branch tube flow mechanism arranged in a branch tube to be supplied with the coating is set according to the measured results. The setting operation is carried out sequentially to other branch tubes. COPYRIGHT: (C)2009,JPO&INPIT |
