GAS SENSOR COMPRISING METAL NANONETWORK LAYER

摘要

The present invention relates to a gas sensor including a metal nanonetwork layer. The gas sensor according to the present invention comprises: a substrate; a semiconductor layer formed on the substrate; a metal nanonetwork layer which is formed on a part of the semiconductor layer and changes the amount of electric charge in the semiconductor layer by reacting with a gas to be detected; a first electrode which is formed on the semiconductor layer on which the metal nanonetwork layer is not formed and separated from the metal nanonetwork layer; and a second gas sensor which is formed on the metal nanonetwork in order to come into contact with a part of the metal nanonetwork layer. The gas sensor according to the present invention uses the metal nanonetwork layer as a gas detecting substance, thereby having a wide area in which the gas sensor comes into contact with a gas to be detected. Therefore, the gas sensor according to the present invention can react with a larger amount of a gas at the same time and change in electrical conductivity increases, as a result, the sensitivity of the gas sensor can be improved.