发明名称 STACKED SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
摘要 Provided is a stacked semiconductor device that includes: a first complementary semiconductor device (100) in which a CMOS circuit and a wiring layer are formed on a semiconductor substrate (110); metal electrodes (141, 142) that are formed on the first complementary semiconductor device (100) together with a wiring layer; semiconductor layers (231, 232) that are formed on the metal electrodes (141, 142) with an insulating film (220) being interposed therebetween, that are separately formed in an nMOS area and a pMOS area, and that contain Ge as a principal component; and a second complementary semiconductor device (200) in which an nMOSFET is formed in the semiconductor layer in the nMOS area and a pMOSFET is formed in the semiconductor layer in the pMOS area.
申请公布号 WO2013190863(A1) 申请公布日期 2013.12.27
申请号 WO2013JP55527 申请日期 2013.02.28
申请人 NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCEAND TECHNOLOGY 发明人 IKEDA, KEIJI;TEZUKA, TSUTOMU;KAMIMUTA, YUUICHI;FURUSE, KIYOE
分类号 H01L21/8238;H01L21/20;H01L21/768;H01L23/522;H01L27/00;H01L27/092;H01L29/41;H01L29/786 主分类号 H01L21/8238
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